Hitachi Energy has signed a major order with German state-owned transmission system operator, TransnetBW to enable the expansion of renewable energy and stabilization of the grid.
Hitachi Energy will supply two Enhanced STATCOM1 stations with the next-generation grid stabilization technology, SVC Light® Enhanced, to enable TransnetBW to improve power quality in the transmission grid, which supplies power to 11 million people and numerous industries.
Seated from left to right: Dr. Rainer Pflaum, CFO TransnetBW, Dr. Werner Götz, CEO TransnetBW, Pascal Daleiden, Country Managing Director Hitachi Energy Austria, Germany and Switzerland, and Stefan Habild, Business Unit Manager Grid Integration, Hitachi Energy Germany AG [
Hitachi, Ltd. (TSE: 6501) has been selected on the A List, the highest score, in the area of Climate Change by global environmental non-profit CDP, in recognition of Hitachi’s leading efforts and highly transparent disclosures related to Climate Change. This is the third consecutive year that Hitachi has been selected for the A List in the areas of Climate Change.
Hitachi has established long-term environmental targets in its Hitachi Environmental Innovation 2050. As part of its action on climate change, Hitachi Group has set the targets of achieving carbon neutrality at its business sites (factories and offices) by FY2030 and across its entire value chain by FY2050. Additionally, to promote sustainable management, Hitachi amended its executive compensation system*, expanding the ratio of sustainability evaluation in the compensation.
Hitachi drives Social Innovation Business to solve customers’ and society’s challenges and supports people’s quality of life with data and technology that fosters a sustainable society.
*News Release on April 25, 2023 “Hitachi Amends Executive Compensation System, Further Strengthening Links Between Corporate Value and Compensation” www.hitachi.com/New/cnews/month/2023/04/230425b.html
The full list of companies that made this year’s CDP A List www.cdp.net/en/companies/companies-scores
CDP is a global non-profit that runs the world’s environmental disclosure system for companies, cities, states and regions. Founded in 2000 and working with more than 740 financial institutions with over $136 trillion in assets, CDP pioneered using capital markets and corporate procurement to motivate companies to disclose their environmental impacts, and to reduce greenhouse gas emissions, safeguard water resources and protect forests. Over 24,000 organizations around the world disclosed data through CDP in 2023, with more than 23,000 companies – including listed companies worth two thirds global market capitalization – and over 1,100 cities, states and regions. Fully TCFD aligned, CDP holds the largest environmental database in the world, and CDP scores are widely used to drive investment and procurement decisions towards a zero carbon, sustainable and resilient economy. CDP is a founding member of the Science Based Targets initiative, We Mean Business Coalition, The Investor Agenda and the Net Zero Asset Managers initiative. Visit cdp.net or follow us @CDP to find out more
About Hitachi, Ltd.
Hitachi drives Social Innovation Business, creating a sustainable society through the use of data and technology. We solve customers’ and society’s challenges with Lumada solutions leveraging IT, OT (Operational Technology) and products. Hitachi operates under the business structure of “Digital Systems & Services” – supporting our customers’ digital transformation; “Green Energy & Mobility” – contributing to a decarbonized society through energy and railway systems, and “Connective Industries” – connecting products through digital technology to provide solutions in various industries. Driven by Digital, Green, and Innovation, we aim for growth through co-creation with our customers. The company’s consolidated revenues for fiscal year 2022 (ended March 31, 2023) totaled 10,881.1 billion yen, with 696 consolidated subsidiaries and approximately 320,000 employees worldwide. For more information on Hitachi, please visit the company’s website at https://www.hitachi.com.
Hitachi High-Tech Corporation today was selected for the 2023 “A List” by CDP(1)(headquartered in the UK), a non-governmental organization that conducts environmental research and information disclosure globally, out of more than 21,000 companies that were evaluated for their Water Security initiatives and transparency in information disclosure. In 2010, we registered with CDP and have continued our efforts to decarbonize, resourcerecycling and harmonized with nature, and today we have been selected for the first time as an “A List”, the highest rating in the field of water security.
Hitachi High-Tech’s Water Security Initiatives
As a member of the Hitachi Group, Hitachi High-Tech Group is pushing forward with efforts to fulfill an environmental vision and long-term environmental targets, “Hitachi Environmental Innovation 2050(2)”. We aim to realize a resource efficient society by improving water use efficiency by 50% or more compared to the base year by FY2050 through the use of circular water and investment in water-saving facilities. Hitachi High-Tech Group is working to utilize watereffectively by reducing the volume of water used through initiatives including productivity improvements and upgrading to water-conserving equipment. As a result, we pursued our activities in FY2022 with a target for water use efficiency 49% compared to the base year FY2010 and achieved 62.1%.
At manufacturing process, we have introduced environmentally conscious design (eco-design), visualized, and improved the environmental impact, including volume of water consumption, throughout the product life cycle, and aim toprovide products with reduced environmental impact.
In addition, Hitachi High-Tech Group aims to realize a resource efficient society through initiatives throughout the value chain, and ask our suppliers to cooperate with us in reducing volume of water consumption and preserving water quality based on the Hitachi Group Sustainable Procurement Guidelines. We will continue to work with our suppliers to conduct corporate activities that are responsible for the global environment.
Encouraged by this selection as an “A List” in the field of water security, Hitachi High-Tech Group will continue to create environmental value through manufacturing aimed at reducing environmental impact and strengthening environmental management, with the aim of contributing to a sustainable global environment.
(1) CDP：CDP is a global non-profit charity that runs the global disclosure system for investors, companies, cities, states and regions to manage their environmental impacts. The organization analyzes and evaluates the environmental initiatives and information disclosure of the world’s major companies in the three themes of climate change; water security; and forests – and selects the best companies as “A List” companies each year. (2) Hitachi Environmental Innovation 2050: Long-term goals established to aim toward building a “decarbonized society,” a “resource efficient society” and a “harmonized society with nature” by 2050, set out under the vision that “Hitachi will resolve environmental issues and achieve both a higher quality of life and asustainable society through its Social Innovation Business in collaborative creation with its stakeholders,” which Hitachi instituted as its Environmental Vision.
Hitachi High-Tech’s Materiality 1: Contributing to a Sustainable Global Environment Hitachi High-Tech Grouphas identified five themes of Materiality based on Sustainable Development Goals (SDGs), which are priority issues for resolving social issues. One of our identified Materiality is “Contributing to the Sustainable GlobalEnvironment,” involving initiatives for realizing a recycling oriented society such as the effective use of waterresources. www.hitachi-hightech.com/global/en/company/sustainability/materiality/global-environment.html
Hitachi High-Tech’s Efforts to Conserve Water Resources www.hitachi-hightech.com/global/en/company/sustainability/environment/water.html
About Hitachi High-Tech
Hitachi High-Tech, headquartered in Tokyo, Japan, is engaged in activities in a broad range of fields, including manufacture and sales of clinical analyzers, biotechnology products, and analytical instruments, semiconductormanufacturing equipment and analysis equipment. and providing high value-added solutions in fields of social &industrial infrastructures and mobility, etc. The company’s consolidated revenues for FY 2022 were approx. JPY 674.2 billion [USD 5.4 billion]. For further information, visit https://www.hitachi-hightech.com/global/en/
Hitachi High-Tech Corporation (“Hitachi High-Tech”) announced today the launch of its GT2000 high-precision electron beam metrology system. GT2000 uses Hitachi High-Tech’s technology and expertise in CD-SEM(1), where itholds the top market share. GT2000 is equipped with new detection systems to cutting-edge 3D semiconductor devices. It also utilizes low-damage high-speed multi-point measurement functions for High-NA EUV(2) resist wafers imaging to minimize resist damage and improve yield in mass production.
GT2000 High-Precision Electron Beam Metrology System
Hitachi High-Tech GT2000 CD-SEM will enable high-precision, high-speed measurements, and inspection in the manufacturing process of advanced semiconductor devices, which are becoming increasingly miniaturized and complex, and contribute to the improvement of customer yields in research-and-development and mass production.
Development Background
As semiconductor device manufacturing processes evolve, research-and-development of N2 (2-nanometer generation node) and A14 (14-angstrom generation node) is underway. In addition to the application of High-NA EUV lithography in state-of-the-art devices, the complexity of device structures is expected to increase, such as the GAA(3) and CFET(4) structures.
Hence, the need for high-speed data acquisition under a wide range of measurement conditions to measure various materials and structures, stable operation and further tool-to- tool matching improvements in the research stages and mass production for cutting-edge semiconductor devices process development is increasing.
Key Technologies
1. 100V ultra-low acceleration voltage and ultra-high-speed multi-point measurement functionality for High-NA EUV processes
In the High-NA EUV lithography process, the resists used are thinner and, therefore, in order to measure it with high precision, metrology tool must cause as little damage as possible to the resist. GT2000 achieves low damage and high-precision measurement by combining pioneering ultra-low acceleration voltage of 100V, with our proprietary high-speed scanning functionality. In addition, it is equipped with an ultra-high-speed multi-pointmeasurement mode to quickly determine manufacturing process conditions and detect abnormalities in research and development stage.
2. High-sensitivity detection system for 3D device structures
3D devices with structures such as GAA, CFET, and 3D memory require measurements of patterns’ depth, hole’ and trenches’ bottoms in addition to conventional CD measurement. GT2000 is equipped with a new highly sensitivedetection system that efficiently detects backs- scattered electrons, enabling high-precision imaging of increasinglycomplex device structures and expanding the possibilities of new measurement applications.
3. New platforms and new electronic optical systems to improve tool-to-tool matching One of the most important performance requirements for CD-SEM, which is responsible for process monitoring, is that the difference in measurement values between multiple tools is small. GT2000 new platform and electronic opticalsystems have been redesigned to eliminate any factors that cause differences in measurement values, thus, improving tool-to-tool matching.
By offering GT2000, as well as our metrology systems using electron beam technology and our optical waferinspection systems, Hitachi High-Tech is working to meet customers’ various needs in processing, measurement, and inspection throughout the semiconductor manufacturing process. We will continue to provide innovative anddigitally enhanced solutions to our products for the upcoming technology challenges, and create new value together with our customers, as well as contributing to cutting-edge manufacturing.
Website for GT2000 https://www.hitachi-hightech.com/global/en/products/semiconductor-manufacturing/cd- sem/metrology-solution/semi-gt2000.html
Introduction Video for GT2000 https://bcove.video/3TltYkl
(1) CD-SEM (Critical Dimension-Scanning Electron Microscope): An equipment designed to perform high-precision measurement of the dimensions of fine semiconductor circuit patterns formed on wafers. (2) High-NA (Numerical Aperture) EUV (Extreme Ultraviolet): Extreme ultraviolet (13.5 nm wavelength) lithography equipment with an improved numerical aperture compared to conventional equipment. (3) GAA (Gate All Around): A transistor structure in which the gate completely covers the channel (4) CFET (Complementary Field Effect Transistor): A complementary field effect transistor in which n-type and p-type devices are stacked
About Hitachi High-Tech Corporation
Hitachi High-Tech Corporation, headquartered in Tokyo, Japan, is engaged in activities in a broad range of fields, including manufacture and sales of clinical analyzers, biotechnology products, and analytical instruments, semiconductor manufacturing equipment and analysis equipment. and providing high value-added solutions in fields of social & industrial infrastructures and mobility, etc.
The company’s consolidated revenues for FY 2022 were approx. JPY 674.2 billion. For further information, visithttps://www.hitachi-hightech.com/global/en/
Contact: Takumichi Sutani Business Planning Dept., Metrology Systems Div., Nano-Technology Solution Business Group, Hitachi High-Tech Corporation Contact Us : Hitachi High-Tech Corporation (hitachi-hightech.com)
Hitachi High-Tech Corporation announced today the launch of the Hitachi Dark Field Wafer Defect Inspection System DI4600 – a new tool for inspecting particles and defects on patterned wafer in semiconductor production lines.
DI4600 offers improved detection capabilities due to the addition of a dedicated server that offers significantly enhanced data processing power required for the detection of particles and defects. Compared to the previous model, system’s throughput has also been improved by approximately 20% through reduced wafer transfer time and improved operations during wafer inspection.
Hitachi Dark Field Wafer Defect Inspection System DI4600
DI4600 will enable highly accurate defect monitoring in semiconductor production lines, which will contribute to the improved yields and better cost of ownership as the semiconductor production volumes will continue to expand going forward.
Development Background
In current social environment, memory semiconductor devices, such as DRAM and FLASH, logic semiconductors, such as MPU and GPU are being used not only in smartphones, laptops, and PCs, but also for generative Artificial Intelligence (AI) computing and autonomous driving. As semiconductor devices shrinkage and complexity progresses, the requirements for manufacturing processes cleanness and inspection capabilities also become more rigorous. Semiconductor manufacturers are constantly striving to improve their competitiveness, particularly when it comes to performance and manufacturing costs. Patterned wafer inspection tools contribute to yield management by inspecting the surfaces of production wafers for particles and defects, allowing engineers to monitor changes and trends of cleanness of semiconductor processing tools, and therefore, have a great impact on semiconductor devices’ performance and manufacturing costs
Key Technologies1. High Throughput
Throughput has been improved by approximately 20% compared to the existing model by reducing wafer transfer time, improving operations during wafer inspection and optimizing data-processing sequence.
2. High-Precision Detection
Detection precision has been improved due to the addition of a dedicated server that offers significantly enhanced data processing capabilities required for the detection of particles and defects.
By offering DI4600, as well as our un-patterned wafer optical inspection systems and electron beam-based products such as a CD-SEM*1 and DR-SEM*2, Hitachi High-Tech is working to meet customers’ various needs in processing, measurement, and inspection throughout the semiconductor manufacturing process. We will continue to provide innovative and enhanced solutions to our products for the upcoming technology challenges, and create new value together with our customers, as well as contributing to cutting-edge manufacturing.
(1) CD-SEM (Critical Dimension-Scanning Electron Microscope): An equipment designed to perform high-precision measurement of the dimensions of fine semiconductor circuit patterns formed on wafers. (2) DR-SEM (Defect Review-Scanning Electron Microscope): An equipment designed to perform high-quality imaging of the defects on fine semiconductor circuit patterns formed on wafers.
About Hitachi High-Tech Corporation
Hitachi High-Tech Corporation, headquartered in Tokyo, Japan, is active in a broad range of fields, including manufacturing and sales of clinical analyzers, biotechnology products, analytical instruments, semiconductor manufacturing and analysis equipment. and provides high value-added solutions in fields of social and industrial infrastructure, mobility, etc.The company’s consolidated revenues for FY 2022 were approx. JPY 674.2 billion. For further information, visit https://www.hitachi-hightech.com/global/en/
Contact: Naoyuki ShindomoBusiness Planning Dept., Metrology Systems Div. Nano-Technology Solution Business Group Hitachi High-Tech Corporation Tel : +81-833-41-8704 E-mail: naoyuki.shindomo.dh@hitachi-hightech.com
