Hitachi High-Tech Announces the SU9600: Next-Generation Ultrahigh-Resolution Scanning Electron Microscope with High Throughput
Speeding up the growth of digitalized possessions and the implementation of Lumada 3.0 with a concentrate on the semiconductor field through the launch of a flagship design
Ultrahigh-Resolution Scanning Electron Microscope SU9600
TOKYO, October 31, 2025 -(JCN Newswire)- Hitachi High-Tech Corporation(“Hitachi High-Tech”has actually introduced the Ultrahigh-Resolution Scanning Electron Microscope SU9600, which enables extremely precise and exact observation of compounds to the sub-nano level(* 1). The SU9600 maintains the world-leading high resolution. It likewise includes effective and automatic functions to supply enhanced throughput of information acquisition, therefore assisting users with extremely accurate and extremely effective observation. In action to the growing need for massive information analysis driven by the increase of AI, Hitachi High-Tech supports the research study and advancement of next-generation semiconductors and innovative products.
Hitachi Group is advancing Lumada 3.0, supplying digital services that integrates information created from digitalized properties with domain understanding and advanced AI. Through the SU9600 as a digitalized possession that gets and produces information, Hitachi High-Tech is recognizing the digital service “HMAX for Industry” that embodies Lumada 3.0, intending to provide higher worth to our consumers. By concentrating on “Integrated Industry Automation” which intends to broaden “HMAX for Industry” into development markets horizontally such as semiconductors, we will add to drive development for frontline employees.
(* 1) Sub-nano level: Less than one nanometer (one millionth of a millimeter) in size.
SU9600 Development Background
Scanning Electron Microscopes (“SEM”are utilized in a large range of fields, consisting of semiconductor gadgets, electronic devices and sophisticated products. They have actually ended up being important in cases needing high-precision observation of microstructures, consisting of whatever from research study and advancement to procedure control at production websites. In specific, the current rise in AI-driven need within the semiconductor market has actually sped up advancement cycles and developed a growing requirement for high-precision, high-throughput analysis utilizing SEMs. This is driven by the requirement for faster development and exact dimensional control of gadgets with minimized function sizes. In reaction, expectations are increasing for making use of SEM to supply feedback in research study and production procedures through massive information analysis.
Offered these situations, Hitachi High-Tech has actually established the SU9600. Structure on the high accuracy and steady observation abilities– particular of our existing high-resolution FE-SEMs(* 2), we have actually established automatic imaging and data-handling workflows to assist simplify observation by increasing throughput. The SU9600 can be utilized for a wide range of observations in line with user requirements consisting of scholastic fundamental research study.
(* 2) Field Emission SEM
Highlight of SU9600
(1) High-Resolution, High-Precision Observation Powered by Hitachi’s Proprietary Technologies
The SU9600 consists of Hitachi’s exclusive CFE Electron Gun (Cold Field Emission Electron Gun) innovation. The CFE Electron Gun makes it possible for the emission of an extremely steady and luminescent electron beam, suggesting observation can start right away after the gadget is launched. This enables long, constant acquisition of sharp, high-contrast images with outstanding S/N(* 3). The SU9600’s enhanced column structure has actually made the acquisition of even brighter and higher-precision images possible.
(* 3) S/N (Signal to Noise Ratio): Ratio of signal strength divided by sound strength. Typically, the greater the S/N, the much better.
In addition, Hitachi’s exclusive in-lens unbiased lens innovation improves its first-rate resolution, allowing high-precision observation in this flagship design of Hitachi High-Tech’s SEM lineup.
Secondary Electron Resolution
(2) Custom Capture Modes to Suit User Needs through High Resolution and High Throughput
In addition to supplying increased flexibility in regards to setting the electron beam scanning time, SU9600 likewise consists of a Custom Reduced Scan function(* 4), making it possible for users to pick just their wanted field of vision for imaging. The gadget likewise includes a High-Definition Image Capture function(* 4) efficient in recording high-resolution pictures of as much as 40k pixels. Integrating these functions makes it possible for the effective acquisition of high-precision image information.
(3) Automatic Observations Streamline Large-Scale Data Acquisition
With current advances in details processing innovation, analysis is carried out based upon big quantities of information gotten by observing various locations at different operating conditions. The SU9600 can be geared up with EM Flow Creator(* 4), an automation software application that helps in reducing operator work when obtaining big quantities of information. This allows operators to set up a series of actions by integrating condition settings such as zoom, phase position, focus and contrast according to their particular requirements. As an outcome, users can run constant automated observations, which considerably decreases operator work and lessens the manual setup and change jobs that were formerly needed.
(* 4) STEM Resolution, Custom Reduced Scan function, High-Definition Image Capture function, and EM Flow Creator are optional functions.
About SU9600
https://www.hitachi-hightech.com/us/en/products/microscopes/sem-tem-stem/fe-sem/su9600.html
About Hitachi High-Tech
Hitachi High-Tech supplies advanced innovations, services and products to society and clients with its business vision of “Changing the World and Future with the Power of Knowledge” to add to a sustainable international environment, healthy, safe and safe lives, and the continual advancement of science and market. We make and offer medical analyzers, biotechnology items and radiation treatment systems in the health care field, semiconductor production and evaluation devices in the semiconductor field, along with analytical systems and electron microscopic lens utilized in ecological fields and products research study. We are likewise taken part in a wide variety of service locations worldwide, offering high added-value options in battery, interaction facilities, train assessment, digital and other commercial and social facilities fields. We offer options through a much deeper understanding of the concerns dealing with society and our consumers to add to recognizing a sustainable society. The business’s combined incomes for FY2024 were approx. JPY 756.5 billion. For additional info, check out https://www.hitachi-hightech.com/global/en/
Service Contact
Bito
International Sales Strategy Dept.,
Company Strategy Planning Div.,
Core Technology & & Solutions Business Group,
Hitachi High-Tech Corporation
nanami.bito.vz@hitachi-hightech.com
